Toxic Gases Treatment
Semiconductor and LCD Processes—12”FAB

Gas supply system |
Residual Gas destructor |
Emergency Wet scrubber |
![]() |
![]() |
![]() |
Local Dry Scubber |
![]() |
|
![]() |
||
Semiconductor and LCD Processes—12”FAB

Gas supply system |
Residual Gas destructor |
Emergency Wet scrubber |
![]() |
![]() |
![]() |
Local Dry Scubber |
![]() |
|
![]() |
||